Book Name: An Introduction to Microelectromechanical Systems Engineering, Second Edition
Author: Nadim Maluf and Kirt Williams
ISBN : 1-58053-590-9
This book focuses on basic concepts of Microelectromechanical system which is very essential for undergraduate students of electrical engineering, mechanical engineering and computer engineering. It deals with the basic concept of processes for micro machining, MEMs structure and systems in industrial and automotive application.