An Introduction to MEMs Engineering by Nadim Maluf and Kirt Williams

mems engineering

Book Name: An Introduction to Microelectromechanical Systems Engineering, Second Edition

Author: Nadim Maluf and Kirt Williams

ISBN : 1-58053-590-9

Description:

This book focuses on  basic concepts of Microelectromechanical system which is very essential for undergraduate students of electrical engineering, mechanical engineering and computer engineering. It deals with the basic concept of processes for micro machining, MEMs structure and systems in industrial and automotive application.

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